資料の表示
[M] Journal of Vacuum Science & Technology Vol.14 No.3-6 / No.4 ; Proceedings of the 4th Annual Conference on the Physics of Compound Semiconductor Interfaces, 8-10 February 1977 Nassau Inn Princeton, New Jersey / No.5 ; Proceedings of the Symposium on Dielectric Thin Films on Semiconductor Devices, 4 May 1977 RCA Laboratories Princeton, New Jersey / No.6 ; Proceedings of the NASA/AVS Symposium on the Use of the Space Shuttle for Science and Engineering, 9-11 May 1977 NASA-Ames Research Center Moffett Field, Calfornia Vol.14 No.3-6
出版者: for The American Vacuum Society by the American Institute of Physics
(出版日: 1977)
定期刊行物: | Journal of Vacuum Science & Technology |
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版: | |
巻号: | 巻: Vol.14 号: No.3-6 |
形態: | 冊子体 |
言語: | English |
ページ数と大きさ: | 769p; 29cm |
件名: | |
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タグ: |
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識別子: | ISSN: 00225355 |
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注記: |