資料の表示
[M]
Journal of Vacuum Science & Technology Vol.15 No.3-6 / No.3 ; Proceedings of the 14th Symposium on Electron, Ion, and Photon Beam Technology, 25-27 May 1977 Rickey's Hyatt House Palo Alto, California / No.4 ; Proceedings of the 5th Annual Conference on the Physics of Compound Semiconductor Interfaces, 17-20 January 1978 Davidson Conference Center University of Southern California University Park Los Angeles, California / No.5 ; Proceedings of the AVS Symposium on Ion Implantation -- New Prospects for Materials Modification, 14 June 1978 T.J. Watson Research Center Yorktown Heights, New York Vol.15 No.3-6 
出版者: for The American Vacuum Society by the American Institute of Physics
(出版日: 1978)
| 定期刊行物: | Journal of Vacuum Science & Technology |
|---|---|
| 版: | |
| 巻号: | 巻: Vol.15 号: No.3-6 |
| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | 837p; 29cm |
| 件名: | |
| 分類: | |
| タグ: |
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| 識別子: | ISSN: 00225355 |
| アブストラクト: | |
| 注記: |
