[M] Journal of Vacuum Science & Technology A Vol.6 No.3 Vol.6 No.3

Publisher: American Vacuum Society (Date of publication: 1988)

• Detail

Periodical:	Journal of Vacuum Science & Technology A
Edition:
Number:	Volume number: Vol.6 Issue number: No.3
Form:	Volume
Language:	English
Physical description:	29
Subject:
Classification:
Tag:
Identifier:	ISSN: 07342101
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
120469	Sengen	Journal Archives	||T-3447	Available On Shelf Not For Loan