資料の表示
[M] Journal of Vacuum Science & Technology A Vol.9 No.3(2) Part 2 : No.3, Proceedings of The 37th National Symposium of The American Vacuum Society 8-12 October 1990 Metro Toronto Convention Center Toronto, Canada Vol.9 No.3(2) Part2
出版者: for The American Vacuum Society by the American Institute of Physics
(出版日: 1991)
定期刊行物: | Journal of Vacuum Science & Technology A |
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形態: | 冊子体 |
言語: | English |
ページ数と大きさ: | 1227p; 29cm |
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識別子: | ISSN: 07342101 |
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