資料の表示
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Journal of Vacuum Science & Technology A Vol.10 No.4(2-3) : Proceedings of the 38th National Symposium of the American Vacuum Society, Part III 11-15 November 1991 Washington State Convention Center Seattle, Washington Vol.10 No.4(2-3) 
出版者: for The American Vacuum Society by the American Institute of Physics
(出版日: 1992)
| 定期刊行物: | Journal of Vacuum Science & Technology A |
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| 版: | |
| 巻号: | 巻: Vol.10 号: No.4(2-3) |
| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | 1389p; 29cm |
| 件名: | |
| 分類: | |
| タグ: |
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| 識別子: | ISSN: 07342101 |
| アブストラクト: | |
| 注記: |
