[M] Journal of Vacuum Science & Technology A Vol.11 No.1-3 Vol.11 No.1-3

Publisher: for The American Vacuum Society by the American Institute of Physics (Date of publication: 1993)

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Edition:
Number:	Volume number: Vol.11 Issue number: No.1-3
Form:	冊子体
言語:	English
Physical description:	1p; 29cm
Subject:
Classification:
Identifier:	ISSN: 07342101
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
140246	Sengen	Journal Archives	||20581	Available On Shelf Not For Loan

• [M] Journal of Vacuum Science & Technology A

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• Sengen (27)

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• 1990 - 1999 (57)
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