資料の表示
[M] Journal of Vacuum Science & Technology A Vol.11 No.4 : Proceedings of the 39th National Symposium of the American Vacuum Society, Part I 9-13 November 1992 Hyatt Regency Chicago, Illinois Vol.11 No.4
出版者: for The American Vacuum Society by the American Institute of Physics
(出版日: 1993)
定期刊行物: | Journal of Vacuum Science & Technology A |
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版: | |
巻号: | 巻: Vol.11 号: No.4 |
形態: | 冊子体 |
言語: | English |
ページ数と大きさ: | 739p; 29cm |
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識別子: | ISSN: 07342101 |
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