資料の表示
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Journal of Vacuum Science & Technology A Vol.12 No.4 :Papers from the 40th National Symposium of the American Vacuum Society 15-19 November 1993 Orange County Convention Center Orlando, Florida Vol.12 No.4 
出版者: for The American Vacuum Society by the American Institute of Physics
(出版日: 1994)
| 定期刊行物: | Journal of Vacuum Science & Technology A |
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| 版: | |
| 巻号: | 巻: Vol.12 号: No.4 |
| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | 895p; 29cm |
| 件名: | |
| 分類: | |
| タグ: |
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| 識別子: | ISSN: 07342101 |
| アブストラクト: | |
| 注記: |
