[M] Journal of Vacuum Science & Technology A Vol.12 No.5-6 Vol.12 No.5-6

Publisher: for The American Vacuum Society by the American Institute of Physics (Date of publication: 1994)

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Edition:
Number:	Volume number: Vol.12 Issue number: No.5-6
Form:	冊子体
言語:	English
Physical description:	2605p; 29cm
Subject:
Classification:
Identifier:	ISSN: 07342101
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
127492	Sengen	Journal Archives	|J|21341	Available On Shelf Not For Loan

• [M] Journal of Vacuum Science & Technology A

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