資料の表示
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Journal of Vacuum Science & Technology A Vol.15 No.4-6 : Papers from the 43rd National Symposium of the American Vacuum Society, Part II 14-18 October 1996 Philadelphia Convention Center Philadelphia, Pennsylvania Vol.15 No.4-6 
出版者: for The American Vacuum Society by the American Institute of Physics
(出版日: 1997)
| 定期刊行物: | Journal of Vacuum Science & Technology A |
|---|---|
| 版: | Sixth edition |
| 巻号: | 巻: Vol.15 号: No.4-6 |
| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | 1801 p. (1 - 1801) |
| 件名: | |
| 分類: | |
| タグ: |
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| 識別子: | ISSN: 07342101 |
| アブストラクト: | |
| 注記: |
