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[M] Journal of Vacuum Science & Technology A Vol.15 No.4-6 : Papers from the 43rd National Symposium of the American Vacuum Society, Part II 14-18 October 1996 Philadelphia Convention Center Philadelphia, Pennsylvania Vol.15 No.4-6
Publisher: for The American Vacuum Society by the American Institute of Physics
(Date of publication: 1997)
Periodical: | Journal of Vacuum Science & Technology A |
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Edition: | Sixth edition |
Number: | Volume number: Vol.15 Issue number: No.4-6 |
Form: | Volume |
Language: | English |
Physical description: | 1801 p. (1 - 1801) |
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Identifier: | ISSN: 07342101 |
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Item identifier | Library | Shelf | Call number | Circulation status |
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123640 | Sengen | Journal Archives | |J|23463 |
Available On Shelf Not For Loan |