[M] Journal of Vacuum Science & Technology B Vol.14 No.5-6 Vol.14 No.5-6

Publisher: for The American Vacuum Society by American Institute of Physics (Date of publication: 1996)

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Periodical:	Journal of Vacuum Science & Technology B
Edition:
Number:	Volume number: Vol.14 Issue number: No.5-6
Form:	Volume
Language:	English
Physical description:	3219p; 29cm
Subject:
Classification:
Tag:
Identifier:	ISSN: 0734211X
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
129000	Sengen	Journal Archives	|J|22824	Available On Shelf Not For Loan

• [M] Journal of Vacuum Science & Technology B