[M] Journal of Vacuum Science & Technology B Vol.17 No.5-6 Vol.17 No.5-6

Publisher: published by The American Vacuum Society through the American Institute Physics (Date of publication: 1999)

• Detail
• Related manifestation (1)

Periodical:	Journal of Vacuum Science & Technology B
Edition:
Number:	Volume number: Vol.17 Issue number: No.5-6
Form:	Volume
Language:	English
Physical description:	1897p; 29cm
Subject:
Classification:
Tag:
Identifier:	ISSN: 0734211X
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
124727	Sengen	Journal Archives	|J|24545	Available On Shelf Not For Loan

• [M] Journal of Vacuum Science & Technology B