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[M] Microlithography : us Volume


Creator: Publisher: SPIE Optical Engineering Press Institution of Electrical Engineers (Date of publication: 1997)

Series statement:
  • IEE materials & devices series 12 . Handbook of microlithography, micromachining and microfabrication ; v. 1
Edition:
Number: Volume number: : us
Form: Volume Volume
Language: English
Physical description: viii, 768 p. ; 26 cm
Subject:
Classification:
Tag:
Identifier: ISBN: 9780819423788
Abstract:

Note:

"SPIE press monograph PM39"//Includes bibliographical references and index
Item identifier Library Shelf Call number Circulation status
218623 Sengen Stack 8 Picture 621.3|R|11306 Available On Shelf
Not For Loan