[M] Handbook of Microlithography, Micromachining, and Microfabrication Vol.1 Microlithography Vol.1 Microlithography PM39

Creator: P. Rai-Choudhury, editor Publisher: SPIE Optical Engineering Press, IEE (Date of publication: 1997)

• Detail

Series statement:	IEE Materials and Devices Series
Edition:
Number:	Volume number: PM39
Form:	Volume
Language:	English
Physical description:	768p; 26cm
Subject:
Classification:	UDC: 621.3
Tag:
Identifier:	ISBN: 9780819423788
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
218623	Sengen	Reference Books 23	621.3|R|11306	Available On Shelf

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