[M] Journal of Vacuum Science & Technology B Vol.18 No.1-3

Publisher: for The American Vacuum Society by American Institute of Physics (Date of publication: 2000)

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Periodical:	Journal of Vacuum Science & Technology B
Edition:
Number:	Volume number: Vol.18 Issue number: No.1-3
Form:	Volume
Language:	English
Physical description:	1p; 29cm
Subject:
Classification:
Tag:
Identifier:	ISSN: 0734211X
Abstract:
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• [M] Journal of Vacuum Science & Technology B