[M] Journal of Vacuum Science & Technology B Vol.22 No.1-2

Publisher: published by The American Vacuum Society(AVS) through the American Institute Physics(AIP) (Date of publication: 2004)

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Periodical:	Journal of Vacuum Science & Technology B
Edition:
Number:	Volume number: Vol.22 Issue number: No.1-2
Form:	Volume
Language:	English
Physical description:	1p; 28cm
Subject:
Classification:
Tag:
Identifier:	ISSN: 0734211X
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
132158	Sengen	Journal Archives	||27971	Available On Shelf Not For Loan

• [M] Journal of Vacuum Science & Technology B