Showing Manifestation
[M]
Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
Publisher:
American Institute of Physics
| Titlte alternative | J. vac. sci. technol., B, Microelectronics process. phenom//Journal of vacuum science & technology. B, Microelectronics processing and phenomena//Journal of vacuum science and technology. B, Microelectronics processing and phenomena//Microelectronics processing and phenomena | ||
| ISSN | 0734211X | ||
| NCID | AA10635106 | ||
| Holding information |
【並木】<年次:1983-1990>Vol.1-8 |
| Note | 【配架場所】並木 集密書庫27
|