資料の表示
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Journal of Vacuum Science & Technology. Second series. B, Microelectronics and Nanometer Structures, Processing, Measurement and Phenomena 27(6) 
出版者: American Vacuum Society American Institute of Physics
(出版日: 2009)
| 定期刊行物: | Journal of Vacuum Science & Technology B |
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| 版: | |
| 巻号: | 巻: 27(6) |
| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | 29 |
| 件名: | |
| 分類: | |
| タグ: |
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| 識別子: | ISSN: 0734211X |
| アブストラクト: | |
| 注記: |
