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Materials Science of Microelectromechanical Systems (MEMS) Devices Ⅱ: Symposium held november 29-December 1, 1999, Boston, Massachusetts, U.S.A.; MRS Vol.605 Vol.605 Vol.605
editors, Maarten P. de Boer, Arthur H. Heuer, S. Joshua Jacobs, Eric Peeters
Materials Research Society (MRS)
(2000)
UDC: MRS
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