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1 Materials Science of Microelectromechanical Systems (MEMS) Devices Ⅱ: Symposium held november 29-December 1, 1999, Boston, Massachusetts, U.S.A.; MRS Vol.605 Vol.605 Vol.605 Volume
Item identifier Library Shelf Call number Circulation status
218782 Sengen Proceedings 26 Picture MRS|P|11456 Available On Shelf