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1 LSI製造におけるプロセス高性能化技術 : ガス供給システム 第1編 Technology Volume
Item identifier Library Shelf Call number Circulation status
210874 Sengen Books 13 Picture 661.9|H|12350 Available On Shelf
2 薄膜の力学的特性評価技術 : トライボロジー・内部応力・密着性 Volume
Item identifier Library Shelf Call number Circulation status
219451 Sengen Books 5 Picture 539.3|K|11869 Available On Shelf
3 熱電変換工学 : 基礎と応用 Thermoelectrics : Principles and Applications Volume
Item identifier Library Shelf Call number Circulation status
219338 Sengen unknown 621.36|S|11791 On Loan
( Due date:
May 04, 2024 )
4 半導体デバイス工程評価技術 ライフタイム、DLTS評価を中心として Volume
Item identifier Library Shelf Call number Circulation status
529622 Namiki Books 16 Picture 621.382|U|05575 Available On Shelf
5 最新プラズマプロセスのモニタリング技術と解析・制御 Volume
Item identifier Library Shelf Call number Circulation status
529621 Namiki Books 5 Picture 533.9|H|05574 Available On Shelf
6 シリコン結晶欠陥の基礎物性とその評価法 Basic Properties of Defects in Silicon and Their Characterizing Techniques Volume
Item identifier Library Shelf Call number Circulation status
529620 Namiki Books 16 Picture 621.382|U|05573 Available On Shelf
7 半導体デバイス界面の汚染・損傷の評価と対策 Volume
Item identifier Library Shelf Call number Circulation status
529619 Namiki Books 16 Picture 621.382|k|05572 Available On Shelf
8 薄膜の力学的特性評価技術 トライボロジー・内部応力・密着性 Volume
Item identifier Library Shelf Call number Circulation status
529618 Namiki Books 8 Picture 539.3|k|05571 Available On Shelf
9 熱電変換工学 −基礎と応用ー Volume
Item identifier Library Shelf Call number Circulation status
522897 Namiki Books 6 Picture 536.2|S|05553 On Loan
( Due date:
May 18, 2024 )
10 熱分析の基礎と応用第 3版@−超伝導からバイオまで.その多彩な展開− Volume
Item identifier Library Shelf Call number Circulation status
522702 Namiki Books 6 Picture 536.6|| Available On Shelf

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