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In Situ Process Diagnostics and Modelling : Symposium held April 6-7, 1999, San Francisco, California, U.S.A. ; MRS Vol.569 Vol.569 Vol.569
editors: Orlando Auciello, Alan R. Krauss, Eugene A. Irene [et al.]
Materials Research Society (MRS)
(1999)
UDC: MRS
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