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Microelectromechanical Systems - Materials and Devices Ⅱ : Symposium held December 1-2, 2008, Boston, Massachusetts, U.S.A. MRS Vol.1139 Vol.1139 Vol.1139
editors: Srikar Vengallatore, Jorg Bagdahn, Norman F. Sheppard Jr., S. Mark Spearing
Materials Research Society (MRS)
(2009)
UDC: MRS
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