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塗布・乾燥のトラブル対策
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Plasma surface modification and plasma polymerization
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薄膜工学
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Chemical vapor deposition of refractory metals and ceramics II : symposium held December 4-6, 1991, Boston, Massachusetts, U.S.A. II
Besmann, Theodore M. Gallois, Bernard M. Warren, James W.
Materials Research Society
(1992)
UDC: 539.23
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Handbook of sputter deposition technology : principles, technology, and applications
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気体分離膜・透過膜・バリア膜の最新技術 = Gas separation, permeation and barrier membranes
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薄膜作製応用ハンドブック
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薄膜ハンドブック
オーム社
(2008-3)
UDC: 539.23
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分子線エピタキシー技術
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21世紀版薄膜作製応用ハンドブック
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