[M] Fabrication of submicron GaAs/AlAs double-barrier resonant tunneling diodes by wet etching with in droplets as mask

Creator: Mitsuishi Kazutaka Noda T Mano T (Date of publication: 2007-11)
https://hdl.handle.net/20.500.11932/143972

Manifestation: Fabrication of submicron GaAs/AlAs double-barrier resonant tunneling diodes by wet etching with in droplets as mask

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Created at: Mon, 14 Jul 2025 15:01:34 +0900

Updated at: Mon, 14 Jul 2025 15:46:30 +0900