[M] Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.

editors, Rajiv K. Singh ... [et al.]
Creator: Singh, Rajiv K Publisher: Materials Research Society (Date of publication: 2001)

Manifestation: Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|613

Register number:

Item identifier: 218945

Include supplements: No

Required role: Guest

Acquired at: August 23, 2001

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:43:09 +0900

Updated at: Wed, 03 Dec 2025 16:34:39 +0900