[M] IC,LSIプロセスにおける薄膜の生成加工 No.86

Creator: 國岡昭夫 [ほか] Publisher: トリケップス (Date of publication: 1982-01-01)

Manifestation: IC,LSIプロセスにおける薄膜の生成加工

Shelf: Books 22 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 621.38|K|7080

Register number:

Item identifier: 204314

Include supplements: No

Required role: Guest

Acquired at: March 31, 1982

Note:

Accepted at:

Created at: Wed, 15 Dec 2010 23:44:45 +0900

Updated at: Mon, 15 Dec 2025 09:44:11 +0900