[M] Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.

editors, Harold Kahn ... [et al.]
Creator: Kahn, Harold Publisher: Materials Research Society (Date of publication: 2001)

Manifestation: Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|657

Register number:

Item identifier: 219096

Include supplements: No

Required role: Guest

Acquired at: January 30, 2002

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Accepted at:

Created at: Thu, 16 Dec 2010 00:00:33 +0900

Updated at: Wed, 03 Dec 2025 16:34:43 +0900