[M] Journal of Vacuum Science & Technology B Vol.15 No.5-6 Vol.15 No.5-6

Publisher: for The American Vacuum Society by American Institute of Physics (Date of publication: 1997)

Manifestation: Journal of Vacuum Science & Technology B Vol.15 No.5-6 Vol.15 No.5-6

Shelf: Other (Sengen)

Checkout type: 標準

Circulation status: Removed

Call number: |J|23465

Register number:

Item identifier: 123642

Include supplements: No

Required role: Guest

Acquired at: February 10, 1999

Note:

Accepted at:

Created at: Thu, 16 Dec 2010 01:43:41 +0900

Updated at: Mon, 12 May 2025 10:04:58 +0900