[M] Plasma electronics : applications in microelectronic device fabrication

by T. Makabe and Z. Petrović
Creator: 真壁, 利明 Petrović, Z. (Zoran Lj) Publisher: Taylor & Francis (Date of publication: 2006)

Manifestation: Plasma electronics : applications in microelectronic device fabrication

Shelf: Books 11 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: 539.2|M|5714

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Item identifier: 529978

Include supplements: No

Required role: Guest

Acquired at: October 17, 2006

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Created at: Thu, 16 Dec 2010 02:25:13 +0900

Updated at: Mon, 15 Dec 2025 09:32:35 +0900