[M] Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.

editors, B.J. Pawlak ... [et al.]
Creator: Materials Research Society. Spring Meeting Pawlak, B. J. Publisher: Materials Research Society (Date of publication: 2008)

Manifestation: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A.

Shelf: Journal Archives 60 (Namiki)

Checkout type: 標準

Circulation status: Available On Shelf

Call number: MRS|P|1070

Register number:

Item identifier: 211137

Include supplements: No

Required role: Guest

Acquired at: November 28, 2008

Note:

Accepted at:

Created at: Thu, 16 Dec 2010 02:46:05 +0900

Updated at: Wed, 03 Dec 2025 16:35:09 +0900