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[M] Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena 29 4-6

(Date of publication: 2011)

Periodical:	Journal of Vacuum Science & Technology B
Series statement:	Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena (ISSN: 0734211X)
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Number:	Volume number: 29 Issue number: 4-6
Form:	Volume
Language:	English
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Identifier:	ISSN: 0734211X
Abstract:
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Item identifier	Library	Shelf	Call number	Circulation status
134802	Namiki	Journal Archives 27		Available On Shelf Not For Loan