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[M] Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena 29 4-6 Volume


(Date of publication: 2011)

Periodical: Journal of Vacuum Science & Technology B
Series statement:
  • Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
(ISSN: 0734211X)
Edition:
Number: Volume number: 29 Issue number: 4-6
Form: Volume Volume
Language: English
Physical description:
Subject:
Classification:
Tag:
Identifier: ISSN: 0734211X
Abstract:

Note:

Item identifier Library Shelf Call number Circulation status
134802 Sengen Journal Archives Picture Available On Shelf
Not For Loan