[M] 窒化炭素薄膜の合成に及ぼす基板材料の影響

Creator: 高垣, 甲児 青井, 芳史 上篠, 榮治 (Date of publication: 2003)
https://hdl.handle.net/20.500.11932/874568

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Collection:	元素戦略ライブラリー
Form:	Volume
Language:	unknown
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Identifier:	Handle URI: https://hdl.handle.net/20.500.11932/874568
Full-text file	第Ⅰ会場030521_1_10AOCR.pdf (0.06 MB) NIMS Read Only License: Prohibit Commercial Use (NIMS only)
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