[M] 反応性スパッタリングによるαアルミナの成膜

Creator: 小原, 利光 玉垣, 浩 碇, 賀充 (Date of publication: 2003)
https://hdl.handle.net/20.500.11932/892571

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Collection:	元素戦略ライブラリー
Form:	Volume
Language:	unknown
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Identifier:	Handle URI: https://hdl.handle.net/20.500.11932/892571
Full-text file	第Ⅲ会場030522_3-26AOCR.pdf (0.08 MB) NIMS Read Only License: Prohibit Commercial Use (NIMS only)
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