[M] Ion Implantation and Synthesis of Materials

Michael Nastasi, James W. Mayer
Publisher: Springer Berlin Heidelberg (Date of publication: 2006)
https://link.springer.com/openurl?genre=book&isbn=978-3-540-45298-0

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Form:	Online resource
Language:	English
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Identifier:	ISBN: 9783540452980 DOI: 10.1007/978-3-540-45298-0
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