[M] Rare-Earth Implanted MOS Devices for Silicon Photonics

Lars Rebohle, Wolfgang Skorupa
Publisher: Springer Berlin Heidelberg (Date of publication: 2010)
https://link.springer.com/openurl?genre=book&isbn=978-3-642-14447-9

• Detail

Series statement:	Springer Series in Materials Science 142
Form:	Online resource
Language:	English
Physical description:
Subject:
Classification:
Tag:
Identifier:	ISBN: 9783642144479 DOI: 10.1007/978-3-642-14447-9
Abstract:
Note:

Item identifier	Library	Shelf	Call number	Circulation status
(No number)	Web	Web		Available On Shelf