[M] Reactive Sputter Deposition

Diederik Depla, Stijn Mahieu
Publisher: Springer Berlin Heidelberg (Date of publication: 2008)
https://link.springer.com/openurl?genre=book&isbn=978-3-540-76664-3

• Detail

Series statement:	Springer Series in Materials Science 109
Form:	Online resource
Language:	English
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Identifier:	ISBN: 9783540766643 DOI: 10.1007/978-3-540-76664-3
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Item identifier	Library	Shelf	Call number	Circulation status
(No number)	Web	Web		Available On Shelf