[M] Materials and Processes for Next Generation Lithography

Publisher: Elsevier (Date of publication: 2016)
https://www.sciencedirect.com/science/book/9780081003541

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Form:	Online resource
Language:	English
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Identifier:	ISBN: 9780081003541 ISSN: 18762778 DOI: 10.1016/c2014-0-03651-9
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Item identifier	Library	Shelf	Call number	Circulation status
(No number)	Web	Web		Available On Shelf