[M] Surface Metrology for Micro- and Nanofabrication

Publisher: Elsevier (Date of publication: 2021)
https://www.sciencedirect.com/science/book/9780128178508

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Form:	Online resource
Language:	English
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Identifier:	ISBN: 9780128178508 DOI: 10.1016/c2018-0-02291-4
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Item identifier	Library	Shelf	Call number	Circulation status
(No number)	Web	Web		Available On Shelf