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Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena 
Publisher: American Institute of Physics
| Titlte alternative | Journal of vacuum science and technology. B, 2nd series. Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena//JVSTB, Nanotechnology & microelectronics | ||
| ISSN | 21662746 | ||
| NCID | AA10804928 | ||
| Holding information |
【並木】＜年次:1991-2013＞Vol.9-31 |
| Note | 【配架場所】並木 集密書庫27
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