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Ion implantation
edited by Fred H. Eisen [and] Lewis T. Chadderton
Creator: International Conference on Ion Implantation in Semiconductors Eisen, Fred H. Chadderton, Lewis T. Publisher: Gordon and Breach Science Publishers (Date of publication: 1971)
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| Language: | English |
| Physical description: | xii, 464 p. ; 27 cm |
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ISBN: 9780677150000
NCID: BA2311173X
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1st International Conference on Ion Implantation in Semiconductors held in Thousand Oaks, California, May 4-9th, 1970//Includes bibliographical references |
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