資料の表示
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Gettering and deffect engineering in semiconductor technology : GADEST '93 : proceedings of the 5th International Autumn Meeting held in Chossewitz, near Frankfurt(Oder), Germany, October 09-14, 1993 
editors, H.G. Grimmeiss, M. Kittler and H. Richter
著者: International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology Grimmeiss, H. G. Kittler, M. Richter, H. 出版者: SciTec Publications (出版日: 1993)
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冊子体
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| 言語: | English |
| ページ数と大きさ: | xvii, 630 p. ; 25 cm |
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ISBN: 9783908450009
NCID: BA21152678
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| 注記: |
Includes bibliographical references and index |
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