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[M] Gettering and Defect Engineering in Semiconductor Technology '97 : Proceedings of The 7th International Autumn Meeting GADEST '97 Vol.57-58 Vol.57-58
Creator: C. Claeys J. Vanhellemont [et.al. editor] Publisher: Scitec Publications
(Date of publication: 1997)
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Number: | Volume number: Vol.57-58 |
Form: | Volume |
Language: | English |
Physical description: | 538p; 25cm |
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Identifier: | ISBN: 9783908450276 |
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