資料の表示
[M]
Ion implantation and beam processing 
edited by J.S. Williams, J.M. Poate
著者: Williams, J. S. (James Stanislaus) Poate, J. M. 協力者・編者: edited by J.S. Williams, J.M. Poate 出版者: Academic Press (出版日: 1984)
| 形態: |
冊子体
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| 言語: | English |
| ページ数と大きさ: | xi, 419 p. ; 24 cm |
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| 識別子: |
ISBN: 9780127569802
NCID: BA06909986
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| 注記: |
Includes bibliographical references and index |
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