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Ion implantation, sputtering and their applications
by P. D. Townsend, J. C. Kelly, N. E. W. Hartley
Creator: Townsend, Peter David Kelly, J. C. (John Clive) Hartley, W. N. Publisher: Academic Press (Date of publication: 1976)
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| Language: | English |
| Physical description: | ix, 333 p. ; 24 cm |
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ISBN: 9780126969504
NCID: BA07511624
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Includes bibliographies and index |
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