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[M] Ion Implantation, Sputtering and their Applications
Creator: by P.D. Townsend, J.C. Kelly, N.E.W. Hartley Publisher: Academic Press
(Date of publication: 1976)
Form: | Volume |
Language: | English |
Physical description: | 333p; 24cm |
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Identifier: | ISBN: 9780126969504 |
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