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Ion beam assisted film growth
edited by Tadatsugu Itoh
Creator: 伊藤, 糾次 Contributor: edited by Tadatsugu Itoh Publisher: Elsevier (Date of publication: 1989)
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| Language: | English |
| Physical description: | xvii, 439 p ; 25 cm |
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ISBN: 9780444872807
NCID: BA06776816
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Includes index |
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