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Materials Issues in Vacuum Microelectronics : Symposium held April 13-16, 1998, San Francisco,California, U.S.A. MRS Vol.509 Vol.509 Vol.509 
Creator: editors: Wei Zhu , Lawrence S. Pan , Thomas E. Felter [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 1998)
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| Number: | Volume number: Vol.509 |
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Volume
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| Language: | English |
| Physical description: | 207p; 24cm |
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| Identifier: | ISBN: 9781558994157 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 217922 | Sengen |
Proceedings 26 
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MRS|Ｐ|10715 | Available On Shelf |