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Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. 
editors, Rajiv K. Singh ... [et al.]
Creator: Singh, Rajiv K Publisher: Materials Research Society (Date of publication: 2001)
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Volume
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| Language: | English |
| Physical description: | 1 v. ; 24 cm |
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ISBN: 9781558995215
NCID: BA52827327
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Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 218945 | Namiki |
Journal Archives 60 
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MRS|P|613 | Available On Shelf |