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Chemical-Mechanical Polishing 2000 - Fundamentals and Materials Issues : Symposium held April 26-27, 2000, San Francisco, California, U.S.A. ; MRS Vol.613 Vol.613 Vol.613 
Creator: editors； Rajiv K. Singh, Rajeev Bajaj, Mansour Moinpour [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2001)
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| Number: | Volume number: Vol.613 |
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Volume
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| Language: | English |
| Physical description: | 24 |
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| Identifier: | ISBN: 9781558995215 |
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| Item identifier | Library | Shelf | Call number | Circulation status |
|---|---|---|---|---|
| 218945 | Sengen |
Proceedings 26 
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MRS|P|11516 | Available On Shelf |