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ALE-3 : proceedings of the Third International Symposium on Atomic Layer Epitaxy and Related Surface Processes, Sendai, Japan, 25-27 May, 1994 
edited by: Masashi Ozeki ... [et al.]
Creator: International Symposium on Atomic Layer Epitaxy and Related Surface Processes 尾関, 雅志 Publisher: North-Holland Elsevier (Date of publication: 1994)
| Periodical: | Control of Semiconductor Interfaces : ISCSI-2 Proceedings of the Second International Symposium on the Control of Semiconductor Interfaces, Karuizawa, Japan, October 28-November 1, 1996 |
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Volume
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| Language: | English |
| Physical description: | xvii, 621 p. ; 27 cm |
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ISSN: 01694332
NCID: BA23996954
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Includes bibliographical references and indexes//Reprinted from: Applied surface science v.82/83 (1994) |
