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Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A. 
editors, B.J. Pawlak ... [et al.]
Creator: Materials Research Society. Spring Meeting Pawlak, B. J. Publisher: Materials Research Society (Date of publication: 2008)
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Volume
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| Language: | English |
| Physical description: | xi, 319 p. ; 24 cm |
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ISBN: 9781605110400
NCID: BA88653487
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"This volume contains papers presented at Symposium E, 'Doping engineering for front-end processing' held March 25-27 at the 2008 MRS Spring Meeting in San Francisco, California."--Pref.//Includes bibliographical references and indexes |
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| Item identifier | Library | Shelf | Call number | Circulation status |
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| 211137 | Namiki |
Journal Archives 60 
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MRS|P|1070 | Available On Shelf |