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[M] Doping Engineering for Front-End Processing : Symposium held March 25-27, 2008, San Francisco, California, U.S.A. ; MRS Vol.1070 Vol.1070 Vol.1070
Creator: editors;B.J. Pawlak, M.L. Pelaz, M.Law [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 2008)
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Number: | Volume number: Vol.1070 |
Form: | Volume |
Language: | English |
Physical description: | 319p; 24cm |
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Identifier: | ISBN: 9781605110400 |
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Item identifier | Library | Shelf | Call number | Circulation status |
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211137 | Sengen | Proceedings 26 | MRS|P|12521 | Available On Shelf |