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[M] Rapid Thermal and Integrated Processing 7 : Symposium held April 13-15, 1998, San Francisco, California, U.S.A.; MRS Vol.525 Vol.525 Vol.525
Creator: editors: Mehmet C. Ozturk, Fred Roozeboom, Paul J. Timans [et al.] Publisher: Materials Research Society (MRS)
(Date of publication: 1998)
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Number: | Volume number: Vol.525 |
Form: | Volume |
Language: | English |
Physical description: | 403p; 24cm |
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Identifier: | ISBN: 9781558994317 ISSN: 02729172 |
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Item identifier | Library | Shelf | Call number | Circulation status |
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217942 | Sengen | Proceedings 26 | MRS|P|10735 | Available On Shelf |